There is all around the world a big activity within research and development of micro and nanotechnology.
Polyteknik is specialized in manufacturing technology equipment that support and is targeted towards the activities in research groups on universities and research institutions.
Polyteknik is specialized in designing, developing and manufacturing systems for Thin Film deposition in vacuum.
The Cryofox systems can be delivered as standalone machines or van be integrated in clean room facilities. The Cryofox systems are ideal for coating of wafers and 3D objects.
Within research and development flexibility is of great importance. Our systems are based on PVD technology with E-Beam, DC/RF sputtering and thermal evaporation. The combination of E-beam and sputtering allows good flexibility.
Our solutions for University/R&D are:Cryofox Explorer 600 LT
Long throw distance E
Beam deposition
Ideal for Lift Off processes
Cryofox Explorer 600 Solar
Sputter deposition system with DC/RF magnetrons
Ideal for solar cell development
Cryofox Explorer 600 Flex
E-Beam deposition and DC/RF sputtering magnetrons
Ideal for general material research and nanotech
Cryofox Explorer 600 LT Flex
Long throw distance E
Beam de/position and DC/RF sputtering magnetrons
Ideal for Lift Off and general material research
Cryofox PRO 650 WEB
Roll to roll DC/RF Sputtering system
Ideal for coating of metallic or ceramic coating on polymer or metallic web
Cryofox Explorer 700
Multi process unit
Split chamber for LT E-beam source and short distance RF/DC Sputtering
Ideal for optical coatings, Lift-off and MEMS applications
Cryofox Hexagon
Cluster model with PVD, CVD and ALD
Depositioning and processing on Ø300 mm wafers or Ø320 mm general tooling
Modul base structure for each process.
