The Cryofox Discovery 501ds is a single chamber thin film deposition unit, equipped with up to four rectangular magnetrons or a large number of smaller circular magnetrons. With this configuration of magnetrons, it is possible to deposit multi layer structures from two sides at the same time without breaking the vacuum. This system can handle both odd shaped substrates and wafers up to 8". It is primarily a system for small scale production of high-end electronics or optics.

• Single chamber system
• Up to eight 4" wafers per batch
• Maximum four rectangular magnetrons

The Cryofox Discovery 400 is a single chamber thin film deposition unit equipped with up to four circular magnetrons. Because of the position of the magnetrons, it is possible to do alloy layers by co-deposition from two or three sources. This gives the user total freedom to choose the composition of the layers from pure source materials and makes it the perfect research tool utilizing magnetron sputtering.

• Single chamber system
• Single 4" or 6" wafer per batch
• Maximum four magnetrons