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INDUSTRIAL SERIES
The Cryofox industrial series is build on the machine concept Infinity. This concept consists of a minimum of three individual chambers in elongation of each other. The first chamber is a loading chamber while the last chamber is an unloading station. Between these two obligatory chambers there is a number of process chambers, the amount of which relies solely on the complexity of the process. Because of the modularity it is possible to scale up the system after delivery. This can keep the acquisition cost low, since a simple system can be delivered with limited production capacity and then later be up-scaled by adding more modules. In situations where the customer has a finished process, Polyteknik can supply the raw machine which will be tailor-made for this specific process. When a process development is required, prior to the design of the final machine, we will go into this development in collaboration with the customer.
Modular
Web or fixtures with samples
Up-scaling volume after delivery is possible
Large change in process is possible after delivery
Varity of processes available
ROLL-TO-ROLL SYSTEMS
Infinity systems
The Cryofox Infinity systems for roll to roll processes do not demand any requirements regarding the type of substrate. The system can handle foil of metal, polymer, textile etc. The system is designed with respect to the final process and can handle foils of widths from 40mm to 1200mm. Because of the high level of modularity, the sequence of process chambers in the line can easily be changed which makes the system suitable for both process development and actual production. After delivery of the system, additional modules can be added for new process steps or up-scaling of speed or volume.
TECHNICAL SPECIFICATIONS
Foil width
40 mm - 1200 mm
Substrate/foil material
Metal, Polymer, Textile, etc.
Processes
E-beam, Sputtering, Thermal evaporation, PECVD, plasma cleaning
High vacuum pumping
Cryogenic or turbo molecular pumps
IN-LINE BATCH SYSTEMS
In-Line Batch Infinity systems
The in-line batch systems in the Cryofox Infinity program can handle fixtures with sizes of maximum 600x600 mm. A carrier belt moves each fixture through a number of process chambers where each layer is deposited. Each process step in the line can be repeated by moving the fixture back to a previous station, so that an unlimited number of layers can be applied. In the in-line batch series the loading chamber can also be used as a un-loading chamber, which reduces the minimum number of modules to just two.
TECHNICAL SPECIFICATIONS
Fixture size
300x300 mm - 600x600 mm
Substrate material
Wafer, glass sheet, component
Processes
Sputtering, PECVD, plasma cleaning
High vacuum pumping
Cryogenic or turbo molecular pumps